SiGe-on-insulator and strained-Si-on-insulator for strained-Si CMOS and nanocrystalline-Ge waveguides
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2003. === Includes bibliographical references (p. 191-201). === SiGe-on-insulator (SGOI) and strained-Si-on-insulator (SSOI) substrates combine both the benefits of a high-quality, monocrystalline SiG...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/7968 |