Design and optimization of x-y-[t̳h̳e̳t̳a̳]z̳, cylindrical flexure stage
Thesis (S.B.)--Massachusetts Institute of Technology, Department of Mechanical Engineering, 2013. === Cataloged from PDF version of thesis. In title on title page, double-underscored "t̳h̳e̳t̳a̳" appears as Greek letter. In title on title page, double underscored "z̳" appears as...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | English |
| Published: |
Massachusetts Institute of Technology
2014
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/1721.1/83727 |