Design and development of an improved two-axis meso-scale electro-magnetic actuator for a flexure based nano-positioner
Thesis (S.B.)--Massachusetts Institute of Technology, Department of Mechanical Engineering, 2013. === Cataloged from PDF version of thesis. === Includes bibliographical references (page 50). === The intent of this thesis is to provide theory behind the design and development of an improved two-axis...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2014
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| Online Access: | http://hdl.handle.net/1721.1/83729 |