Fabricating silicon germanium waveguides by low pressure chemical vapor deposition
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2002. === Includes bibliographical references (p. 110-112). === Low loss optical waveguide structures combining the high bandwidth of light transmission and the economics of silicon substrates have been...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/8427 |