Pulsed plasma enhanced chemical vapor deposition of fluorocarbon thin films for dielectric applications
Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1999. === Includes bibliographical references. === by Catherine B. Labelle. === Ph.D.
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2014
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| Online Access: | http://hdl.handle.net/1721.1/85358 |