Dielectric sensing of silicon accelerometers

Thesis: M. Eng., Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, 2013. === Cataloged from PDF version of thesis. === Includes bibliographical references (pages 107-108). === Microaccelerometers have established themselves as a vital piece of the glob...

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Bibliographic Details
Main Author: Kroese, Bethany Ruth
Other Authors: Dana Weinstein.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2014
Subjects:
Online Access:http://hdl.handle.net/1721.1/85433