An evaluation of critical issues for microhydraulic transducers : silicon wafer bonding, strength of silicon on insulator membranes and gold-tin solder bonding
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2001. === Includes bibliographical references (p. 121-127). === Microhydraulics transducers (MHT) are a class of microelectromechanical systems (MEMS) currently being developed to produce bi-directional transducer...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/8552 |