Materials lead time reduction in a semiconductor equipment manufacturing plant : process flow planning
Thesis: M. Eng. in Manufacturing, Massachusetts Institute of Technology, Department of Mechanical Engineering, 2013. === Cataloged from PDF version of thesis. === Includes bibliographical references (pages 90-92). === Process flow at a semiconductor tool manufacturer was studied with the goal of red...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2014
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| Online Access: | http://hdl.handle.net/1721.1/85785 |