Simulation tools for microelectromechanical systems
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Civil and Environmental Engineering, 2001. === Includes bibliographical references (p. 101-104). === In this thesis efficient techniques to solve complex 3-D electromechanical problems are developed. Finite element discretization of co...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/8625 |