Defect reactions and impurity control in silicon
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Nuclear Engineering, 1997. === Includes bibliographical references (p. 225-234). === This Ph.D. thesis has covered the scientific issues of defect reactions involving dopants and impurities in Si, and the applications of this knowledge...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | English |
| Published: |
Massachusetts Institute of Technology
2005
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/1721.1/8635 |