Defect reactions and impurity control in silicon
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Nuclear Engineering, 1997. === Includes bibliographical references (p. 225-234). === This Ph.D. thesis has covered the scientific issues of defect reactions involving dopants and impurities in Si, and the applications of this knowledge...
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Format: | Others |
Language: | English |
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Massachusetts Institute of Technology
2005
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Online Access: | http://hdl.handle.net/1721.1/8635 |