A complete MEMS analysis system and implementation

A complete MEMS analysis system and implementation

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2000. === Includes bibliographical references (p. 60). === by Xudong Tang. === S.M.

Bibliographic Details
Main Author: Tang, Xudong, 1967-
Other Authors: Donald E. Troxel.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2014
Subjects:
Electrical Engineering and Computer Science.
Online Access:http://hdl.handle.net/1721.1/86552

Internet

http://hdl.handle.net/1721.1/86552

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