Thermally-actuated piezoresistively-sensed mechanical silicon oscillator
Thesis: S.M., Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, 2014. === Cataloged from PDF version of thesis. === Includes bibliographical references (pages 75-78). === In the past two decades, Microelectromechanical (MEMS) resonators have emerged as...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2014
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| Online Access: | http://hdl.handle.net/1721.1/87951 |