Vertical silicon nanowire arrays for gas sensing
Thesis: S.M., Massachusetts Institute of Technology, Department of Mechanical Engineering, February 2014. === Cataloged from PDF version of thesis. "February 2014." === Includes bibliographical references (pages 92-97). === The goal of this research was to fabricate and characterize vertic...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2014
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| Online Access: | http://hdl.handle.net/1721.1/87971 |