An assessment of the aerodynamic, thermodynamic, and manufacturing issues for the design, development, and microfabrication of a demonstration micro engine
Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Aeronautics and Astronautics, 2000. === "September 2000." === Includes bibliographical references. === Silicon microfabrication is an established technology for the manufacture of integrated circuits and microelectromechanical...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | English |
| Published: |
Massachusetts Institute of Technology
2005
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/1721.1/8822 |