Alternative passivation for silicon (100), environmentally benign manufacturing, and cooperative strategy in semiconductor industry

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering; and, (S.M.)--Massachusetts Institute of Technology, Technology and Policy Program, 2000. === Includes bibliographical references (p. 118-120). === My personal involvement, as a research graduate student...

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Bibliographic Details
Main Author: Chan, Julia Kam Chu, 1972-
Other Authors: Lionel C. Kimerling and Robert Rose.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2005
Subjects:
Online Access:http://hdl.handle.net/1721.1/8850