Design, fabrication, experimentation and analysis of high-speed microscale gas bearings
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2001. === Includes bibliographical references (p. [183]-190). === Microengine Program. The all-silicon device consist of a free-rotating microturbine, with 4.2 mm rotor diameter, enclosed within a five wafer fusio...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/8876 |