Design of a precision chemical mechanical planarization research system
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2000. === Includes bibliographical references (leaf 208). === by Fardad Ali Hashemi. === S.M.
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2014
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| Online Access: | http://hdl.handle.net/1721.1/89285 |