Fabrication of stress controlled silicon oxide for free- standing MEMS Devices

Fabrication of stress controlled silicon oxide for free- standing MEMS Devices

Thesis: S.M., Massachusetts Institute of Technology, Department of Mechanical Engineering, 2014. === Cataloged from PDF version of thesis. === Includes bibliographical references (pages 95-101). === In development of the critical -angle transmission (CAT) grating, structural failure of the thin self...

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Bibliographic Details
Main Author: Guan, Dong, S.M. Massachusetts Institute of Technology
Other Authors: Mark L. Schattenburg.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2014
Subjects:
Mechanical Engineering.
Online Access:http://hdl.handle.net/1721.1/92141

Internet

http://hdl.handle.net/1721.1/92141

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