Hybrid silicon/silicon carbide microstructures and silicon bond strength tests for the MIT Microengine

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Aeronautics and Astronautics, 2000. === Also available online at the MIT Theses Online homepage <http://thesis.mit.edu>. === Includes bibliographical references (leaves 109-113). === The Gas Turbine Laboratory (GTL) and the Microsy...

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Bibliographic Details
Main Author: Miller, Bruno, 1974-
Other Authors: S. Mark Spearing.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2005
Subjects:
Online Access:http://theses.mit.edu/Dienst/UI/2.0/Describe/0018.mit.theses%2f2000-90
http://hdl.handle.net/1721.1/9238