Performance measurements of MEMS analysis system
Thesis (M.Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1999. === Includes bibliographical references (leaves 89-90). === Designers and manufacturers of Micro Electromechanical Systems need accurate instruments to examine the mechanical propertie...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/9473 |