Microelectromechanical (MEMS) structures for thin film property measurement
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1998. === Includes bibliographical references (leaf 87). === Microelectromechanical systems (MEMS) are becoming the bases for an important industry with potential applications in numerous fields. The cu...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/9735 |