Computer aided macromodeling for MEMS

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998. === Includes bibliographical references (p. 85-87). === by Lynn Daniel Gabbay. === Ph.D.

Bibliographic Details
Main Author: Gabbay, Lynn Daniel
Other Authors: Stephen D. Senturia.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2005
Subjects:
Online Access:http://hdl.handle.net/1721.1/9955