Slurry abrasive particle agglomeration experimentation and modeling for chemical mechanical planarization (CMP)
Thesis: Ph. D., Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, 2015. === Cataloged from PDF version of thesis. === Includes bibliographical references (pages 177-188). === A theoretical modeling approach is developed to predict silica-specific insta...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2015
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| Online Access: | http://hdl.handle.net/1721.1/99832 |