Study on plasma-enhanced metal-organic chemical vapor deposition for future gallium nitride devices
名古屋大学博士学位論文 学位の種類:博士(工学) 学位授与年月日:2014-03-25
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| Language: | en |
| Published: |
2014
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| Online Access: | http://hdl.handle.net/2237/20282 |