Characteristics of C_3 radicals in high-density C_4F_8 plasmas studied by laser-induced fluorescence spectroscopy
| Main Authors: | , , |
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| Language: | en |
| Published: |
American Institute of Physics
2000
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| Online Access: | http://dx.doi.org/10.1063/1.1321029 http://hdl.handle.net/2237/7037 |