Electrostatic Latch Mechanism for Handling Projection on Arrayed Vertical Motion System
Main Authors: | , , , |
---|---|
Language: | en |
Published: |
IEEE
2007
|
Subjects: | |
Online Access: | http://dx.doi.org/10.1109/SENSOR.2007.4300338 http://hdl.handle.net/2237/9556 |