Electrostatic Latch Mechanism for Handling Projection on Arrayed Vertical Motion System

Bibliographic Details
Main Authors:	Takagi, S., Sasaki, H., Shikida, M., Sato, K.
Language:	en
Published:	IEEE 2007
Subjects:	latch mechanism arrayed vertical motion system electrostatic force
Online Access:	http://dx.doi.org/10.1109/SENSOR.2007.4300338 http://hdl.handle.net/2237/9556

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spelling	ndltd-NAGOYA-oai-ir.nul.nagoya-u.ac.jp-2237-95562013-08-08T03:19:34ZElectrostatic Latch Mechanism for Handling Projection on Arrayed Vertical Motion SystemTakagi, S.Sasaki, H.Shikida, M.Sato, K.latch mechanismarrayed vertical motion systemelectrostatic forceIEEE2007Article(publisher)http://dx.doi.org/10.1109/SENSOR.2007.4300338http://hdl.handle.net/2237/9556Solid-State Sensors, Actuators and Microsystems Conference. 2007, p.1147-1150enCopyright © 2007 IEEE. Reprinted from (relevant publication info). This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of Nagoya University’s products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to pubs-permissions@ieee.org.
collection	NDLTD
language	en
sources	NDLTD
topic	latch mechanism arrayed vertical motion system electrostatic force
spellingShingle	latch mechanism arrayed vertical motion system electrostatic force Takagi, S. Sasaki, H. Shikida, M. Sato, K. Electrostatic Latch Mechanism for Handling Projection on Arrayed Vertical Motion System
author	Takagi, S. Sasaki, H. Shikida, M. Sato, K.
author_facet	Takagi, S. Sasaki, H. Shikida, M. Sato, K.
author_sort	Takagi, S.
title	Electrostatic Latch Mechanism for Handling Projection on Arrayed Vertical Motion System
title_short	Electrostatic Latch Mechanism for Handling Projection on Arrayed Vertical Motion System
title_full	Electrostatic Latch Mechanism for Handling Projection on Arrayed Vertical Motion System
title_fullStr	Electrostatic Latch Mechanism for Handling Projection on Arrayed Vertical Motion System
title_full_unstemmed	Electrostatic Latch Mechanism for Handling Projection on Arrayed Vertical Motion System
title_sort	electrostatic latch mechanism for handling projection on arrayed vertical motion system
publisher	IEEE
publishDate	2007
url	http://dx.doi.org/10.1109/SENSOR.2007.4300338 http://hdl.handle.net/2237/9556
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Electrostatic Latch Mechanism for Handling Projection on Arrayed Vertical Motion System

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