Electrostatic Latch Mechanism for Handling Projection on Arrayed Vertical Motion System
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Online Access: | http://dx.doi.org/10.1109/SENSOR.2007.4300338 http://hdl.handle.net/2237/9556 |
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ndltd-NAGOYA-oai-ir.nul.nagoya-u.ac.jp-2237-95562013-08-08T03:19:34ZElectrostatic Latch Mechanism for Handling Projection on Arrayed Vertical Motion SystemTakagi, S.Sasaki, H.Shikida, M.Sato, K.latch mechanismarrayed vertical motion systemelectrostatic forceIEEE2007Article(publisher)http://dx.doi.org/10.1109/SENSOR.2007.4300338http://hdl.handle.net/2237/9556Solid-State Sensors, Actuators and Microsystems Conference. 2007, p.1147-1150enCopyright © 2007 IEEE. Reprinted from (relevant publication info). This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of Nagoya University’s products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to pubs-permissions@ieee.org. |
collection |
NDLTD |
language |
en |
sources |
NDLTD |
topic |
latch mechanism arrayed vertical motion system electrostatic force |
spellingShingle |
latch mechanism arrayed vertical motion system electrostatic force Takagi, S. Sasaki, H. Shikida, M. Sato, K. Electrostatic Latch Mechanism for Handling Projection on Arrayed Vertical Motion System |
author |
Takagi, S. Sasaki, H. Shikida, M. Sato, K. |
author_facet |
Takagi, S. Sasaki, H. Shikida, M. Sato, K. |
author_sort |
Takagi, S. |
title |
Electrostatic Latch Mechanism for Handling Projection on Arrayed Vertical Motion System |
title_short |
Electrostatic Latch Mechanism for Handling Projection on Arrayed Vertical Motion System |
title_full |
Electrostatic Latch Mechanism for Handling Projection on Arrayed Vertical Motion System |
title_fullStr |
Electrostatic Latch Mechanism for Handling Projection on Arrayed Vertical Motion System |
title_full_unstemmed |
Electrostatic Latch Mechanism for Handling Projection on Arrayed Vertical Motion System |
title_sort |
electrostatic latch mechanism for handling projection on arrayed vertical motion system |
publisher |
IEEE |
publishDate |
2007 |
url |
http://dx.doi.org/10.1109/SENSOR.2007.4300338 http://hdl.handle.net/2237/9556 |
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_version_ |
1716595328006750208 |