Mechanical Properties of Silicon-Based Membrane Windows Applied for a Miniature Electron Beam Radiation System
Main Authors: | , , , , |
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Language: | en |
Published: |
IEEE
2007
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Subjects: | |
Online Access: | http://dx.doi.org/10.1109/SENSOR.2007.4300462 http://hdl.handle.net/2237/9570 |