An investigation of the molecular properties of 1,1,1-trichloro methyl silane using laser spectroscopy / M.B. Pelle
Silicon carbide (SiC) is formed from methyltrichlorosilane (CF^SiC^) during a chemical vapour deposition process [Osterhold et al., 1994]. Silicon carbide is one of the important compounds for the Pebble Bed Modular Reactor (PBMR) process because it is used as a coating film in the kernel of the fue...
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North-West University
2009
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| Online Access: | http://hdl.handle.net/10394/2596 |