Kinetics of nano-sized Si₃N₄ powder synthesis via ammonolysis of SiO vapor

An 89 mm-diameter vertical tubular-flow reactor was used to study the kinetics of nano-sized silicon nitride powder synthesis via the animonolysis of SiO vapor at temperatures ranging from 1300°C to 1400°C. The SiO generation rate was controlled by adjusting the mass of SiO particles initially charg...

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Bibliographic Details
Main Author: Vongpayabal, Panut
Other Authors: Kimura, Shoichi
Language:en_US
Published: 2012
Subjects:
Online Access:http://hdl.handle.net/1957/30356