Kinetics of nano-sized Si₃N₄ powder synthesis via ammonolysis of SiO vapor
An 89 mm-diameter vertical tubular-flow reactor was used to study the kinetics of nano-sized silicon nitride powder synthesis via the animonolysis of SiO vapor at temperatures ranging from 1300°C to 1400°C. The SiO generation rate was controlled by adjusting the mass of SiO particles initially charg...
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Language: | en_US |
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2012
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Online Access: | http://hdl.handle.net/1957/30356 |