Nontraditional amorphous oxide semiconductor thin-film transistor fabrication
Fabrication techniques and process integration considerations for amorphous oxide semiconductor (AOS) thin-film transistors (TFTs) constitute the central theme of this dissertation. Within this theme three primary areas of focus are pursued. The first focus involves formulating a general framework...
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Language: | en_US |
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2012
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Online Access: | http://hdl.handle.net/1957/34019 |