Nontraditional amorphous oxide semiconductor thin-film transistor fabrication

Fabrication techniques and process integration considerations for amorphous oxide semiconductor (AOS) thin-film transistors (TFTs) constitute the central theme of this dissertation. Within this theme three primary areas of focus are pursued. The first focus involves formulating a general framework...

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Bibliographic Details
Main Author: Sundholm, Eric Steven
Other Authors: Wager, John F.
Language:en_US
Published: 2012
Subjects:
Online Access:http://hdl.handle.net/1957/34019