Studies of glow discharge oscillations and jet-enhanced cathodic sputtering
Three aspects of glow discharges have been studied: glow discharge oscillations, sputtering, and coupling between cathode and anode regions the two most important regions in a glow discharge. Cathode and anode processes are tightly coupled by electron and ion coupling effects. Both electron and ion...
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| Language: | en_US |
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2012
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| Online Access: | http://hdl.handle.net/1957/34651 |