Kinetic study on the production of silicon nitride by direct nitridation of silicon in a fluidized bed : experiment and modeling

Kinetic study on the production of silicon nitride by direct nitridation of silicon in a fluidized bed : experiment and modeling

Graduation date: 1995

Bibliographic Details
Main Author: Jovanovic, Zoran R.
Other Authors: Kimura, Shoichi
Language:en_US
Published: 2012
Subjects:
Silicon nitride
Nitriding
Fluidization > Mathematical models
Online Access:http://hdl.handle.net/1957/34894

Internet

http://hdl.handle.net/1957/34894

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