Design, fabrication, and testing of inhomogeneous dielectrics
In this thesis the concept of inhomogeneous dielectrics is demonstrated for various optical coating applications. Compositionally-varying silicon oxynitride (SiON) dielectric layers, with the refractive index varying as a function of position, are grown by computer-controlled plasma-enhanced chemica...
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| Language: | en_US |
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2013
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| Online Access: | http://hdl.handle.net/1957/36856 |