Two-dimensional temperature model for target materials bombarded by ion beams

The ion implantation process is a very precise, controllable, and reproducible method used to enhance material properties of finished components such as ball bearings. Essentially, the target material is bombarded by accelerated ions to form a thin alloyed layer in the substrate. As the ions deposit...

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Bibliographic Details
Main Author: Bostick, Kent C.
Other Authors: Klein, Andrew C.
Language:en_US
Published: 2013
Subjects:
Online Access:http://hdl.handle.net/1957/37236