Two-dimensional temperature model for target materials bombarded by ion beams
The ion implantation process is a very precise, controllable, and reproducible method used to enhance material properties of finished components such as ball bearings. Essentially, the target material is bombarded by accelerated ions to form a thin alloyed layer in the substrate. As the ions deposit...
Main Author: | Bostick, Kent C. |
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Other Authors: | Klein, Andrew C. |
Language: | en_US |
Published: |
2013
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Subjects: | |
Online Access: | http://hdl.handle.net/1957/37236 |
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