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PARALLEL FABRICATION OF PHOTONIC CRYSTALS USING INTERFERENCE LITHOGRAPHY

PARALLEL FABRICATION OF PHOTONIC CRYSTALS USING INTERFERENCE LITHOGRAPHY

Bibliographic Details
Main Author: CHINCHOLI, ASHWIN
Language:English
Published: University of Cincinnati / OhioLINK 2005
Subjects:
Photonic crystals,
band gap,
lithography,
photonic band gap,
interference,
Lloyds mirror,
shipley 1805,
waveguides,
fabrication,
silicon,
SOI,
Lumerical,
Translight
Online Access:http://rave.ohiolink.edu/etdc/view?acc_num=ucin1115996014
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Internet

http://rave.ohiolink.edu/etdc/view?acc_num=ucin1115996014

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