Thermal Transient Study of Silica Aerogel Insulated Micro-hotplates
<p> We studied the temperature transient behavior of an airpit-insulated micro hotplate (µHP) and aerogel-insulated µHP with different airpit heights and aerogel thicknesses. The µHP insulated by 1.3µm-thick aerogel consumes 26.7mW of power at 82°...
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| Language: | EN |
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University of Louisiana at Lafayette
2016
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| Online Access: | http://pqdtopen.proquest.com/#viewpdf?dispub=10002455 |