Effect of thermal annealing treatments on the optical and electrical properties of aluminum-doped, amorphous, hydrogenated silicon carbide thin films
In this work, a systematic study of the structural, optical and electrical properties of aluminum doped hydrogenated amorphous silicon carbide (Al-doped a-SiC:H) thin films grown by radio frequency magnetron sputtering is presented. The samples were grown using a high purity Al and SiC targets in a...
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| Format: | Dissertation |
| Language: | English |
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Pontificia Universidad Católica del Perú
2019
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| Online Access: | http://hdl.handle.net/20.500.12404/14529 |