Surface Properties of Hard Fluorinated Amorphous Carbon Films Deposited by Pulsed-DC Discharges
New Generation Lithographic (NGL) techniques have been recently investigated in order to overcome the limitations of the long-used UV lithography. Several techniques have been proposed during the last decades, but the continued improvement of UV lithography rendered them useful only for a limited nu...
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| Format: | Doctoral Thesis |
| Language: | Catalan |
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Universitat de Barcelona
2010
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| Online Access: | http://hdl.handle.net/10803/21773 http://nbn-resolving.de/urn:isbn:978-84-694-3634-9 |