Novel MEMS Grippers for Pick-place of Micro and Nano Objects

Physical pick-and-place promises specificity, precision, and programmed motion, a feature making microrobotic manipulation amenable to automation for the construction of microsystems. Despite the significant progress made, a long-standing difficulty is the release of micro objects from the end effec...

Full description

Bibliographic Details
Main Author: Chen, Ko Lun Brandon Jr.
Other Authors: Sun, Yu
Language:en_ca
Published: 2009
Subjects:
Online Access:http://hdl.handle.net/1807/18252