Femtosecond Laser Microfabrication of Optofluidic Lab-on-a-chip with Selective Chemical Etching
The three-dimensional (3-D) writing capability of a high repetition rate (1 MHz) fiber-amplified femtosecond laser with a wavelength of 522 nm was harnessed together with wet-chemical etching for laser-patterning of 3-D optofluidic microsystems in fused silica glass, by the method of Femtosecond Las...
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| Language: | en_ca |
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2013
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| Online Access: | http://hdl.handle.net/1807/65508 |