Studies on the chemical vapor deposition of silox and polycrystalline silicon films
博士 === 國立交通大學 === 核子工程研究所 === 73 ===
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1984
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| Online Access: | http://ndltd.ncl.edu.tw/handle/07105456759011120032 |