Growth and characterization of silicon nitride and silicon dioxide films prepared by phofo-CVD
碩士 === 國立成功大學 === 電機工程研究所 === 74 ===
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1986
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| Online Access: | http://ndltd.ncl.edu.tw/handle/88077167180350178058 |