The study of solid phase epitaxial regrowth in ion-implanted silicon
博士 === 國立清華大學 === 材料科學工程研究所 === 74 ===
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| Format: | Others |
| Language: | en_US |
| Published: |
1986
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| Online Access: | http://ndltd.ncl.edu.tw/handle/66581041124680809743 |