Formation of a shallow N+/P junction underneath a Ti-Silicide by an ion implantation technique

碩士 === 國立交通大學 === 電子研究所 === 75 ===

Bibliographic Details
Main Authors: WU, DE-YUAN, 吳德源
Other Authors: CHEN, MAO-JIE
Format: Others
Language:zh-TW
Published: 1987
Online Access:http://ndltd.ncl.edu.tw/handle/39982918935044104437