Study of siiicon surface damage induced with ar ion implantation and its passivation by atomic hydrogen
博士 === 國立交通大學 === 電子研究所 === 76 ===
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1988
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| Online Access: | http://ndltd.ncl.edu.tw/handle/22111101962852339606 |