Study of siiicon surface damage induced with ar ion implantation and its passivation by atomic hydrogen
博士 === 國立交通大學 === 電子研究所 === 76 ===
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1988
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ndltd-TW-076NCTU24300022015-10-13T11:08:31Z http://ndltd.ncl.edu.tw/handle/22111101962852339606 Study of siiicon surface damage induced with ar ion implantation and its passivation by atomic hydrogen 低能量氬離子佈植造成的矽晶表面損傷與氫原子鈍化損傷的研究 GIAN, HE-GING 錢河清 博士 國立交通大學 電子研究所 76 CHEN, MAO-JIE 陳茂傑 1988 學位論文 ; thesis 135 zh-TW |
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zh-TW |
format |
Others
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博士 === 國立交通大學 === 電子研究所 === 76 ===
|
author2 |
CHEN, MAO-JIE |
author_facet |
CHEN, MAO-JIE GIAN, HE-GING 錢河清 |
author |
GIAN, HE-GING 錢河清 |
spellingShingle |
GIAN, HE-GING 錢河清 Study of siiicon surface damage induced with ar ion implantation and its passivation by atomic hydrogen |
author_sort |
GIAN, HE-GING |
title |
Study of siiicon surface damage induced with ar ion implantation and its passivation by atomic hydrogen |
title_short |
Study of siiicon surface damage induced with ar ion implantation and its passivation by atomic hydrogen |
title_full |
Study of siiicon surface damage induced with ar ion implantation and its passivation by atomic hydrogen |
title_fullStr |
Study of siiicon surface damage induced with ar ion implantation and its passivation by atomic hydrogen |
title_full_unstemmed |
Study of siiicon surface damage induced with ar ion implantation and its passivation by atomic hydrogen |
title_sort |
study of siiicon surface damage induced with ar ion implantation and its passivation by atomic hydrogen |
publishDate |
1988 |
url |
http://ndltd.ncl.edu.tw/handle/22111101962852339606 |
work_keys_str_mv |
AT gianheging studyofsiiiconsurfacedamageinducedwitharionimplantationanditspassivationbyatomichydrogen AT qiánhéqīng studyofsiiiconsurfacedamageinducedwitharionimplantationanditspassivationbyatomichydrogen AT gianheging dīnéngliàngyàlízibùzhízàochéngdexìjīngbiǎomiànsǔnshāngyǔqīngyuánzidùnhuàsǔnshāngdeyánjiū AT qiánhéqīng dīnéngliàngyàlízibùzhízàochéngdexìjīngbiǎomiànsǔnshāngyǔqīngyuánzidùnhuàsǔnshāngdeyánjiū |
_version_ |
1716838845597614080 |