Study of siiicon surface damage induced with ar ion implantation and its passivation by atomic hydrogen

Study of siiicon surface damage induced with ar ion implantation and its passivation by atomic hydrogen

博士 === 國立交通大學 === 電子研究所 === 76 ===

Bibliographic Details
Main Authors: GIAN, HE-GING, 錢河清
Other Authors: CHEN, MAO-JIE
Format: Others
Language:zh-TW
Published: 1988
Online Access:http://ndltd.ncl.edu.tw/handle/22111101962852339606
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spelling ndltd-TW-076NCTU24300022015-10-13T11:08:31Z http://ndltd.ncl.edu.tw/handle/22111101962852339606 Study of siiicon surface damage induced with ar ion implantation and its passivation by atomic hydrogen 低能量氬離子佈植造成的矽晶表面損傷與氫原子鈍化損傷的研究 GIAN, HE-GING 錢河清 博士 國立交通大學 電子研究所 76 CHEN, MAO-JIE 陳茂傑 1988 學位論文 ; thesis 135 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 博士 === 國立交通大學 === 電子研究所 === 76 ===
author2 CHEN, MAO-JIE
author_facet CHEN, MAO-JIE
GIAN, HE-GING
錢河清
author GIAN, HE-GING
錢河清
spellingShingle GIAN, HE-GING
錢河清
Study of siiicon surface damage induced with ar ion implantation and its passivation by atomic hydrogen
author_sort GIAN, HE-GING
title Study of siiicon surface damage induced with ar ion implantation and its passivation by atomic hydrogen
title_short Study of siiicon surface damage induced with ar ion implantation and its passivation by atomic hydrogen
title_full Study of siiicon surface damage induced with ar ion implantation and its passivation by atomic hydrogen
title_fullStr Study of siiicon surface damage induced with ar ion implantation and its passivation by atomic hydrogen
title_full_unstemmed Study of siiicon surface damage induced with ar ion implantation and its passivation by atomic hydrogen
title_sort study of siiicon surface damage induced with ar ion implantation and its passivation by atomic hydrogen
publishDate 1988
url http://ndltd.ncl.edu.tw/handle/22111101962852339606
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AT qiánhéqīng studyofsiiiconsurfacedamageinducedwitharionimplantationanditspassivationbyatomichydrogen
AT gianheging dīnéngliàngyàlízibùzhízàochéngdexìjīngbiǎomiànsǔnshāngyǔqīngyuánzidùnhuàsǔnshāngdeyánjiū
AT qiánhéqīng dīnéngliàngyàlízibùzhízàochéngdexìjīngbiǎomiànsǔnshāngyǔqīngyuánzidùnhuàsǔnshāngdeyánjiū
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