Study of siiicon surface damage induced with ar ion implantation and its passivation by atomic hydrogen

Study of siiicon surface damage induced with ar ion implantation and its passivation by atomic hydrogen

博士 === 國立交通大學 === 電子研究所 === 76 ===

Bibliographic Details
Main Authors:	GIAN, HE-GING, 錢河清
Other Authors:	CHEN, MAO-JIE
Format:	Others
Language:	zh-TW
Published:	1988
Online Access:	http://ndltd.ncl.edu.tw/handle/22111101962852339606

Internet

http://ndltd.ncl.edu.tw/handle/22111101962852339606