The study of annealing kinetics in fluorine implanted silicon

碩士 === 國立清華大學 === 材料科學工程研究所 === 76 ===

Bibliographic Details
Main Authors: SU, GI-WEN, 蘇啟文
Other Authors: CHEN, LI-JUN
Format: Others
Language:zh-TW
Published: 1988
Online Access:http://ndltd.ncl.edu.tw/handle/25912786630026943222